CVC Sputtering Systems

CVC 601 LL Load Lock (in good condition) with RF Etch
for conversion of CVC 601 sputtering system to Load Lock

 

CVC 601 LL Load LockCVC 601 LL Load LockCVC 601 LL Load LockCVC 601 LL Load Lock

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  • Chamber top plate assembly and hoist
  • Heavy Duty Hoist
  • Loadlock Chamber with Cassette
  • Roughing Manifold
  • RF Etch Assembly with Matchbox ( Matchbox is missing bias pickup)
  • Rotostrate Titanium Table with Pallets ( Missing center hub)
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    CVC 601 Sputtering System

  • Three (3) 8″ DCPED Sputter up targets
  • One (1) 8″ RFPED Sputter up target
  • Pumping system CTI 8 Cryo Pump w/ water cooled compressor
  • SW 1397
  • Lid hoist
  • One (1) Plasma Therm 3 KW RF Generator with Tuning P.S.
  • GIC 400 CVC Ion Gauge
  • GP 310 CVC Pirani Gauge
  • Anode Control for triode Clean
  • CVC Model K4 DC Power Supply
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    CVC DC Target Selector

    CVC DC Target Selector

  • P/N 289490 used on 2800 and 601
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    CVC 2800 Data Acquisition Center Module

  • No picture available
  • Used Module
  • Power Panel for CVC 2800

    Power Panel for CVC 2800

  • P/N 289703 CVC
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    CVC Water Interlock Control

  • No picture available
  • P/N 289703 Used on 2800 and 601
  • CVC 2800 Inter door drive assembly

  • No picture available
  • with Bellows
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